Field emission vacuum power switch using vertically aligned carbon nanotubes
نویسندگان
چکیده
A field emission vacuum switch using vertically aligned carbon nanotubes grown by a direct current plasma enhanced chemical vapor deposition is reported. Cathodes with optimized field emission properties were evaluated in diode configuration as a test vehicle for the construction of a vacuum power three terminal triode device. Limiting factors such as space charge effects involved with high current densities ~more than 10 mA/cm) are also investigated using computer simulations. © 2003 American Vacuum Society. @DOI: 10.1116/1.1527635#
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